Apparatus for liquid-phase epitaxial growth

Details Apparatus for liquid-phase epitaxial growth Apparatus for liquid-phase epitaxial growth

1975-07-10

1977-07-05

McIntosh, John P.

Coating apparatus

Immersion or work-confined pool type

Work-confined pool

118415, 156622, B05C 309

Patent

active

040332918

ABSTRACT:
An apparatus for liquid-phase epitaxial growth is characterized in that the greater part of that surface of a well, made of carbon, which contacts with a solution for liquid-phase epitaxial growth is covered with a fused quartz layer.

REFERENCES:
patent: 3665888 (1972-05-01), Bergh et al.
patent: 3753801 (1973-08-01), Lockwood et al.
patent: 3759759 (1973-09-01), Solomon
patent: 3785884 (1974-01-01), Lockwood

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