Apparatus for laser beam exposure of a substrate disc

Details Apparatus for laser beam exposure of a substrate disc Apparatus for laser beam exposure of a substrate disc

1996-10-04

1999-02-02

Huber, Paul W.

Dynamic information storage or retrieval

With servo positioning of transducer assembly over track...

Optical servo system

369 4415, G11B 700

Patent

active

058674608

ABSTRACT:
In an apparatus for the laser beam exposure of a substrate disc (5), linked block tables (19, 29) are provided, which have each a piezotranslator (24, 31). This makes it possible to perform a fine correction of the movements very rapidly and very precisely.

REFERENCES:
patent: 4375091 (1983-02-01), Dakin et al.
patent: 4385373 (1983-05-01), Howe
patent: 4794581 (1988-12-01), Andresen
EPO Patent Abstracts of Japan; Title: Optical Head; Publ No 60211642; Publ Date Oct. 24, 1985; Appln No. 59066653; Appln Date Apr. 5, 1984; Applicant: NEC Corp.; Inventor Ishikawa Tsutomu.

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