Apparatus for ion-plasma machining workpiece surfaces including

Details Apparatus for ion-plasma machining workpiece surfaces including Apparatus for ion-plasma machining workpiece surfaces including

1991-05-30

1993-11-16

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912152, 20429805, 20419211, B23K 900, H01J 3708

Patent

active

052626113

ABSTRACT:
Apparatus comprises a vacuum chamber (1) accommodating a source (2) of ion flow directed toward the surface being machined, and a system (3) for decelerating ion flow. The system (3) includes a shielding electrode (5) positioned before the workpieces (4) and having a hole (7) for the passage of ion flow, and at least one decelerating electrode (6) electrically insulated from the walls of the vacuum chamber (1) and shielding electrode (5). The decelerating electrode (6) has the form of a magnetic element whose magnetization vector (M) is substantially congruent with the workpiece surface being machined. In addition, line (13) of electron drift current is closed in a direction transverse of the direction of the ion flow.

REFERENCES:
patent: 3740554 (1973-06-01), Morgan, Jr.
patent: 5016563 (1991-05-01), Murakami et al.
patent: 5136171 (1992-08-01), Leung et al.

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