Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1997-05-07
1998-01-06
Font, Frank G.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356431, 2505594, 25055946, G01N 2100, G01N 2184
Patent
active
057060819
ABSTRACT:
Virtually all of the light reflected from an object to be inspected is made incident upon a focusing lens 7, a quantity of light in a regularly reflected light region on an plane P1 where an image is formed by a lens 7 is detected by a photodiode 8, while a quantity of light in a peripherally scattered light region is detected by a photodiode 9. If the quantity of light received (VDET1) in the regularly reflected light region is lower than a first reference value (VREF1) (S1=1), and the quantity of light received (VDET2) in the peripheral scattered light region is higher than a second reference value (VREF2) (S2=1), a determination is made that a defect is present.
REFERENCES:
patent: 5105092 (1992-04-01), Natsubori et al.
patent: 5278635 (1994-01-01), Ono et al.
patent: 5363187 (1994-11-01), Hagiwara et al.
Eishima Masami
Fukasawa Toshio
Nagai Shinichiro
Ono Junichi
Font Frank G.
NSK Ltd.
Vierra-Eisenberg Jason D.
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