Apparatus for inspecting rubbing inferiority of alignment...

Measuring and testing – Testing of apparatus

Reexamination Certificate

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C073S865800, C073S865500

Reexamination Certificate

active

07089814

ABSTRACT:
An apparatus for inspecting rubbing inferiority of an alignment film of a liquid crystal display device by spraying moisture particles, the apparatus including a moisture storing unit for storing moisture, and a moisture particle generating unit for pelletizing moisture ejected from the moisture storing unit and spraying on a substrate.

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patent: 6383329 (2002-05-01), Agarwala et al.
patent: 6503581 (2003-01-01), Shibue et al.
patent: 6586104 (2003-07-01), Matsuda et al.
patent: 6740370 (2004-05-01), Shibue et al.
patent: 6831297 (2004-12-01), Arao
patent: 6853435 (2005-02-01), Tanaka et al.
patent: 2002/0063834 (2002-05-01), Sawasaki et al.
patent: 2003/0057450 (2003-03-01), Arao
patent: 2004/0066556 (2004-04-01), Dontula et al.

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