Apparatus for inspecting defects

Details Apparatus for inspecting defects Apparatus for inspecting defects

2011-08-23

2011-08-23

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237300

Reexamination Certificate

active

08004666

ABSTRACT:
A defect inspection apparatus and method includes a darkfield illumination optical system which conducts darkfield illumination upon the surface of a sample with irradiation light having at least one of wavelength band, a darkfield detection optical system which includes a reflecting objective lens for converging the light scattered from the surface of the sample that has been darkfield-illuminated with the irradiation light having the at least one wavelength band, and imaging optics for imaging onto a light-receiving surface of an image sensor the scattered light that the reflecting objective lens has converged, and an image processor which, in accordance with an image signal obtained from the image sensor of the darkfield detection optical system, discriminates defects or defect candidates present on the surface of the sample.

REFERENCES:
patent: 6180415 (2001-01-01), Schultz et al.
patent: 7714997 (2010-05-01), Shibata et al.
patent: 2004/0017562 (2004-01-01), Tsai et al.
patent: 2004/0042001 (2004-03-01), Vaez-Iravani et al.
patent: 2005/0219518 (2005-10-01), Korngut et al.
patent: 2000-105203 (2000-11-01), None
patent: 2003/069263 (2003-08-01), None

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