Apparatus for inspecting characteristics of semiconductor chips

Details Apparatus for inspecting characteristics of semiconductor chips Apparatus for inspecting characteristics of semiconductor chips

1992-09-04

1995-01-24

Nguyen, Vinh

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324 731, G01R 106

Patent

active

053845315

ABSTRACT:
An apparatus for inspecting characteristics of semiconductor chips has a loading device for loading semiconductor chips onto a testing tray positioned by a servo motor, a CCD camera, an upper contact fixture controlled in X, Y, and .THETA. directions, and a lower contacting fixture driven by a cylinder. Positioning of the contact probe pins is accurately achieved by pattern processing and fully automated inspection is made possible. The apparatus is equipped with the same number of contact probe pins as the number of inspection points of a semiconductor chip; hence, all the cells of a semiconductor chip can be inspected as a unit. Therefore, the inspection can be made in a mode similar to practical conditions that occur after final assembly of the semiconductor chip.

REFERENCES:
patent: 4103232 (1978-07-01), Sugita et al.
patent: 4818169 (1989-04-01), Schram, deceased et al.
patent: 4907931 (1990-03-01), Mallory et al.
patent: 4938654 (1990-07-01), Schram
patent: 5105147 (1992-04-01), Karasikov et al.
patent: 5148100 (1992-09-01), Sekiba

Affiliated with

Also associated with

Rating

Apparatus for inspecting characteristics of semiconductor chips does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for inspecting characteristics of semiconductor chips, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for inspecting characteristics of semiconductor chips will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1470168