Apparatus for inspecting average size of fundamental patterns

Details Apparatus for inspecting average size of fundamental patterns Apparatus for inspecting average size of fundamental patterns

1981-03-04

1983-10-11

Punter, William H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356394, G01B 1100, G01B 902

Patent

active

044088833

ABSTRACT:
An apparatus for determining the average size of fundamental patterns contained in a given region of an object to be inspected, which includes Fourier transform means for producing output data corresponding to a Fourier transform pattern image of the given region of the object, and processor means for processing the output data to provide the actual pattern size information. The Fourier transform means includes a Fourier converter for providing the output data corresponding to Fourier transform patterns. The processor means includes an extractor coupled to the Fourier transform means for extracting a single magnitude data (I.sub.n) representing the order n of spatial frequency component (e.g. 200) from the output data, the magnitude of the order n component changing with variation (e.g. .DELTA.a.sub.H) of the size of patterns; and a data processor coupled to the extractor for determining the average size of patterns in the given region according to the single magnitude (I.sub.n) and providing the actual pattern size information indicating the averge size of the patterns.

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IBM Journal of Research and Development, "Dimensional Measurement and Defect Detection Using Spatial Filtering",. A. L. Flamholz et al., No. 6, Nov. 1973.
Chapman et al., "A Fourier Transform Method for the Verification of Wire Screens for Standard Sieves" Jr. Phys. E. Sci. Instru. 6-1977 pp. 621-626.
Dickey et al., "An Optical Open Area Ratiometer" Optical Engineering" 9/10/80, pp. 793-796 & SPIE Seminar Feb. 6/7/80, L. A. Cal.
Firseter et al., "Method for Measuring the Average Aperture Size of a Plurality of Apertures in a Kinescope Shadow Mask" RCA Tech. Note 1143, 3/76.

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