Apparatus for inspecting alignment film and method for...

Details Apparatus for inspecting alignment film and method for... Apparatus for inspecting alignment film and method for...

2005-12-23

2009-02-17

Nguyen, Dung (Department: 2871)

Liquid crystal cells, elements and systems

Nominal manufacturing methods or post manufacturing...

C349S123000

Reexamination Certificate

active

07492437

ABSTRACT:
An apparatus for inspecting an alignment film and a method for fabricating a liquid crystal display device using the same are disclosed. By changing a spraying structure of a steam inspecting unit to check whether an alignment film is defective or not, a water splash phenomenon can be prevented and spraying can be performed uniformly on a large-scale glass. The apparatus for inspecting an alignment film comprises a first steam generating unit for generating first steam; a second steam generating unit for generating second steam by using the first steam as a heat source; and a steam spraying unit for spraying the second steam onto a substrate of a substrate to inspect an alignment film formed on the substrate.

REFERENCES:
patent: 7089814 (2006-08-01), Chae et al.
patent: 7248346 (2007-07-01), Ho et al.

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