Apparatus for inspecting a surface of an object to be processed

Details Apparatus for inspecting a surface of an object to be processed Apparatus for inspecting a surface of an object to be processed

2007-07-17

2007-07-17

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237500, C356S237300, C356S237400

Reexamination Certificate

active

11171236

ABSTRACT:
An apparatus for inspecting a surface of an object to be processed includes at least one irradiation unit for irradiating a light on the surface of the object; at least one detection unit for detecting a light scattered from the surface of the object in response to the irradiated light; and a determination unit for determining a cause of the scattered light based on the scattered light detected by the detection unit. The irradiation unit irradiates at least one irradiation light of s-polarization and p-polarization while varying an irradiation angle of the irradiated light. The determination unit determines whether the cause of the scattered light is a foreign material or a microscopic defect based on an intensity of the detected scattered light.

REFERENCES:
patent: 5486919 (1996-01-01), Tsuji et al.
patent: 2002/0122174 (2002-09-01), Hamamatsu et al.
patent: 2004/0246476 (2004-12-01), Bevis et al.
patent: 9-210918 (1997-08-01), None

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