Coating apparatus – Program – cyclic – or time control – Sequential energization of plural operations
Patent
1981-03-16
1985-01-08
Smith, John D.
Coating apparatus
Program, cyclic, or time control
Sequential energization of plural operations
118720, 118504, 118726, 118729, 118730, 4272481, 427282, C23C 1308, C23C 1306
Patent
active
044921802
ABSTRACT:
Apparatus for indexing and accurately registering a selected one of a plurality of deposition masks in operative relationship to a substrate comprising carriage means for supporting a plurality of deposition masks in an aligned spaced relationship relative to each other wherein each of the deposition masks has a selected number of prealigned registration members located thereon in a predetermined pattern and which are adapted to co-act with reference registration members loaded thereagainst, gantry means for supporting a substrate at a deposition station above the surface of the deposition masks having the prealigned registration members located thereon, reference registration members which are located on the substrate or around the periphery of the gantry means and which are directed towards and adapted to be loaded against the prealigned registration members to position the gantry means and the substrate relative to the selected one of said plurality of deposition masks, indexing means for transporting the carriage means including one or more deposition masks supported thereby or gantry means along a predetermined path and to index a selected one of the plurality of deposition masks to a deposition station, and gantry loading means which moves the carriage means and gantry means having the substrate and reference registration members toward each other to accurately register the substrate at a predetermined space and position relative to an indexed selected one of the plurality of deposition masks is shown. A method for indexing and accurately registering a substrate to a deposition mask is also shown.
REFERENCES:
patent: 3238918 (1966-03-01), Radke et al.
patent: 3669060 (1972-06-01), Page et al.
patent: 3747558 (1973-07-01), Harel
patent: 4036171 (1977-07-01), Ramet
Huntley et al., IBM Technical Disclosure Bulletin, vol. 21, No. 5, Oct. 1978, pp. 2024-2025.
Brewer et al., "Apparatus for Depositing Thin Film Devices" IBM Tech. Disclosure Bulletin, vol. 21, No. 7, Dec. 1978, pp. 3016-3018.
Applied Magnetics Corporation
Meaney, Jr. Daniel J.
Plantz Bernard F.
Smith John D.
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