Apparatus for hot-probing integrated semiconductor circuits...

Details Apparatus for hot-probing integrated semiconductor circuits... Apparatus for hot-probing integrated semiconductor circuits...

2006-07-10

2010-06-15

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB

Reexamination Certificate

active

07737713

ABSTRACT:
An apparatus for hot-probing integrated semiconductor circuits on wafers is disclosed that includes a support device for accommodating the wafer, a measurement card with electronic circuitry for functional verification of the integrated semiconductor circuits on the wafers, and a test head with contact needles which establishes an electrical contact between the measurement card and the integrated semiconductor circuits, wherein a detachable and coolable shield plate is provided between the measurement card and wafer in order to protect the apparatus.

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