Apparatus for holographic interferometry suitable for inspection

Details Apparatus for holographic interferometry suitable for inspection Apparatus for holographic interferometry suitable for inspection

1995-10-17

1996-08-13

Gonzalez, Frank

Optics: measuring and testing

By particle light scattering

With photocell detection

356359, 356363, 250237G, G01B 9021, G01B 1100

Patent

active

055461867

ABSTRACT:
A holographic interferometry apparatus for inspecting cylindrical optical surfaces. Laser light is split into regular reflection light and diffraction light by a holographic optical element. A reference reflector plate receives the regular reflection light. An object with a cylindrical optical surface receives the diffraction light. The object is held on a specimen holder table which has a four-axis adjustment mechanism which allows adjustments in the X,Y,Z and .theta. directions. Interference fringes are formed by the interference of light reflected from the object and from the reflector plate.

REFERENCES:
patent: 4606640 (1986-08-01), Hirst
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4783055 (1988-11-01), Widen et al.
patent: 5062712 (1991-11-01), Sakuta et al.
patent: 5179863 (1993-01-01), Uchida et al.
patent: 5363196 (1994-11-01), Cameron

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