Heating – Heat generator heats gas or liquid material in a flow structure – Material heated by mixing with combustion products of generator
Patent
1987-11-12
1990-01-02
Yuen, Henry C.
Heating
Heat generator heats gas or liquid material in a flow structure
Material heated by mixing with combustion products of generator
432225, 432233, 432226, F24H 100
Patent
active
048910090
ABSTRACT:
In an apparatus for mounting workpieces or substrates for transport between a receiving or issuing station and a coating station in the interior of a vacuum coating chamber and for the control of the temperature of the workpieces during cathode sputtering, the workpiece carrier is in the form of a hollow body partially filled with a heat transfer medium. On the side of the workpiece carrier facing the coating source there is provided a workpiece socket in the form of an oval channel in which workpieces such as bearing shells can be placed. Parallel to the longitudinal edges of the groove-like workpiece socket, edge strips of gripping jaws are disposed, which hold the workpieces in the workpiece socket. The workpiece carrier is furthermore provided with a heat transfer head against which cooling plates or bodies can be pressed, which are connected by flexible pressure hoses to a cooling circuit.
REFERENCES:
patent: 4142580 (1979-03-01), Bailey
patent: 4244421 (1981-01-01), Kuhlmann
patent: 4570053 (1986-02-01), Ades et al.
patent: 4580972 (1986-04-01), Hsiung
patent: 4673122 (1987-06-01), Dubey
Nachtsheim Ralf
Pivit Werner
Leybold Aktiengesellschaft
Yuen Henry C.
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