Apparatus for holding workpiece by suction

Work holders – With fluid means – Vacuum-type holding means

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

B25B 1100

Patent

active

041312678

ABSTRACT:
Suction apparatus for holding workpieces such as semiconductor substrates or wafers having different diameters comprises a table having an upper surface with a plurality of concentric circular air grooves having different diameters and a plurality of sleeves in radial arcuately spaced bores, respectively, for selectively switching a vacuum source to all or less than all of the grooves. In a preferred embodiment, each sleeve is rotatable about its axis and has a plurality of axially spaced holes which communicate with the vacuum source through the central axial passage in the sleeve. Correspondingly axially spaced holes in the table connect the respective grooves with the bore and are registerable with the sleeve holes through selective rotation of the sleeve to connect the vacuum source and the grooves. The respective sleeves control different numbers of grooves as each is rotated between operating and non-operating positions so as to hold wafers of correspondingly different diameters to the table without necessitating costly and time consuming replacement of major structural components.

REFERENCES:
patent: 1945481 (1934-01-01), Dilkes
patent: 3627338 (1971-12-01), Thompson
patent: 3724835 (1973-04-01), Groth

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus for holding workpiece by suction does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for holding workpiece by suction, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for holding workpiece by suction will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1125698

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.