Apparatus for holding plates

Details Apparatus for holding plates Apparatus for holding plates

1989-02-21

1990-09-11

Focarino, Margaret A.

Handling: hand and hoist-line implements

Contact lens applicator

294 271, A47F 1306

Patent

active

049556495

ABSTRACT:
The apparatus comprises a first holding member having a flat surface which is brought into contact with the nonprocess surface of the semiconductor wafer, a pair of second holding members having inclined surfaces which are spaced apart from said flat surface by a predetermined distance, and cooperate with the flat surface to receive the arcuated edge of the semiconductor wafer. The second holding members are spaced apart from each other in a direction perpendicular to a semiconductor wafer insertion direction. The inclined surfaces being inclined such that a distance between the inclined surfaces and the flat surface is decreased in the semiconductor wafer insertion direction, thereby clamping the arcuated edge portions of the semiconductor wafer.

REFERENCES:
patent: 2723877 (1955-11-01), Palmour et al.
patent: 3274658 (1966-09-01), Pile
patent: 3365227 (1968-01-01), Wildgen
patent: 4173427 (1979-11-01), Beuch et al.
patent: 4248465 (1981-02-01), Halstead
patent: 4452480 (1984-06-01), Maier et al.
patent: 4496180 (1985-01-01), Hillman et al.
patent: 4819789 (1989-04-01), Linner
patent: 4848814 (1989-07-01), Suzuki et al.

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