Apparatus for holding and positioning a substrate cassette

Details Apparatus for holding and positioning a substrate cassette Apparatus for holding and positioning a substrate cassette

1990-05-21

1992-03-03

Talbott, David L.

Supports

With indicator or inspection means

269303, 269315, 414757, F16M 1300

Patent

active

050925571

ABSTRACT:
An apparatus for holding and positioning a substrate or wafer cassette has a receiving plate which is adjustable on a three-point mounting and is lockable in its position of adjustment. The receiving plate carries runner receivers for initial guidance of a cassette onto the plate by engagement with guide runners on the cassette, and locking pins for the final location of the cassette by engagement with marginal strips on the base of the cassette.

REFERENCES:
patent: 2901208 (1959-08-01), Jones
patent: 3799535 (1974-03-01), Baumann
patent: 3977566 (1976-08-01), Hill et al.
patent: 4108407 (1978-08-01), Cable et al.
patent: 4378189 (1983-03-01), Takeshita et al.
patent: 4776744 (1988-10-01), Stonestreet et al.
patent: 4781511 (1988-11-01), Harada et al.
patent: 4873447 (1989-10-01), Imahashi
patent: 4903610 (1990-02-01), Matsumoto et al.
patent: 4934680 (1990-06-01), Schneider
patent: 4944650 (1990-07-01), Matsumoto

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