Apparatus for holding a piece of semiconductor

Details Apparatus for holding a piece of semiconductor Apparatus for holding a piece of semiconductor

1996-09-04

1997-12-02

Krizek, Janice L.

Material or article handling

Elevator or hoist and loading or unloading means therefor

Grab

20429815, 269 21, 414936, 414941, B65G 4724

Patent

active

056928734

ABSTRACT:
An apparatus for and method of holding a semiconductor wafer (11) during a manufacturing process supports the semiconductor wafer (11) in a substantially planar form (15) with a two-platform wafer chuck (19). The two-platform wafer chuck (19) is compatible with handling warped and unwarped wafers, wafer transferring and handling techniques which maintain wafer flatness, and semiconductor manufacturing processes such as photolithography and auto-probing which require semiconductor wafers to be held in a flat configuration.

REFERENCES:
patent: 3645581 (1972-02-01), Lasch, Jr. et al.
patent: 4523985 (1985-06-01), Dimock
patent: 4559716 (1985-12-01), Tadokoro
patent: 4747608 (1988-05-01), Sato et al.
patent: 4869481 (1989-09-01), Yabu et al.
patent: 4955590 (1990-09-01), Narushima et al.
patent: 5065092 (1991-11-01), Sigler
patent: 5065495 (1991-11-01), Narushima et al.
patent: 5316276 (1994-05-01), Heinle
Webster's Inetrnational Dictionary, Third Ed. (1959) p. 1113.

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