Apparatus for heating semiconductor wafers in order to achieve a

Electric heating – Heating devices – Combined with container – enclosure – or support for material...

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219405, 219411, 118 501, 118724, F27B 514, F27D 1102

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active

046492615

ABSTRACT:
An integrating light pipe, very preferably a kaleidoscope, encloses a source of radiant thermal energy, the light pipe and energy source being so arranged as to achieve efficient and substantially uniform heating of a workpiece in a target plane. The pipe has closed ends so as to heat the workpiece from both sides uniformly and efficiently. The apparatus employs CW lamps, pulsed lamps, and a combination of the two.

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