Apparatus for heating or cooling a polishing surface of a...

Details Apparatus for heating or cooling a polishing surface of a... Apparatus for heating or cooling a polishing surface of a...

2008-06-06

2010-11-23

Morgan, Eileen P. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Controlling temperature

C451S053000, C451S287000

Reexamination Certificate

active

07837534

ABSTRACT:
The present invention provides an apparatus for heating or cooling a polishing surface. This apparatus includes a heat exchanger arranged so as to face the polishing surface when the workpiece is polished. The heat exchanger includes a medium passage through which a heat-exchanging medium flows, and a bottom surface facing the polishing surface. At least a part of the bottom surface is inclined with an upward gradient above the polishing surface such that a polishing liquid on the polishing surface generates a lift exerted on the bottom surface during movement of the polishing surface.

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