Apparatus for heating objects to and maintaining them at a desir

Details Apparatus for heating objects to and maintaining them at a desir Apparatus for heating objects to and maintaining them at a desir

1983-12-20

1986-02-04

Camby, John J.

Heating

Work chamber having heating means

219209, 228220, F27B 302, H05B 100, B23K 3102

Patent

active

045682771

ABSTRACT:
An improved apparatus and method are disclosed for heating objects, such as electronic chips being bonded to substrates, in which a copper heat exchanger element (12) comprises a circuitous interior passage (26) through which gases pass from a source (30) to be heated by a heater (74) to a desired temperature and to be cleansed of unwanted oxygen by catalytic reaction, prior to entering a furnace chamber (22) heated from below by the heat exchanger element (12) and from above by a further heater (72) and copper plate (60), whereby essentially uniform gas temperature, acceptably low oxygen concentration and fast cycling times are provided in the furnace chamber (22). See FIG. 1.

REFERENCES:
patent: 3601884 (1971-08-01), Kemeny

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