Heat exchange – Heating and cooling – Heating and cooling of the same material
Patent
1985-10-09
1986-09-02
Camby, John J.
Heat exchange
Heating and cooling
Heating and cooling of the same material
165 805, 165 86, 432120, F25B 2900, F28F 700, F28D 1100
Patent
active
046090371
ABSTRACT:
A first thermally conductive plate holds an article and heats the article with heating elements in the plate. Parallel rails support the first plate above a base. Cooling passageways for coolant flow are in a second thermally conductive plate. The second plate is supported spaced from the base by a shaft in a chamber of the second plate and a spring. During the heating phase, the second plate is spaced apart from the first plate. During the cooling phase, the second plate is urged by the spring into contact with the first plate, so that the second plate acts as a heat sink for the first plate. Vacuum suction and an annular elastomer seal around the top rim of the second plate clamp the first and second plates together in thermal communication. Vacuum suction in the chamber retracts the second plate from the first plate.
REFERENCES:
patent: 4097226 (1978-01-01), Erikson et al.
patent: 4527620 (1985-07-01), Pedersen et al.
Nicollian and Brews, MOS Physics and Technology (1982), p. 625.
Signatone Corporaton, Model S-1040.
Temptronic Corp., Model TP36 ThermoChuck System.
Wentworth Laboratories, TC-100 Tempchuck.
Micromanipulator Company, Inc., C-V Systems.
Lee Steven R.
Wheeler William R.
Camby John J.
Schneck Thomas
Tencor Instruments
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