Apparatus for heating a transparent substrate utilizing an incan

Electric resistance heating devices – Heating devices – Radiant heater

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219390, 373112, 118725, H05B 600, F27D 1100

Patent

active

059702133

ABSTRACT:
A heating disk is located inside a vacuum chamber between a substrate holder inside the chamber and a lamp outside the chamber. The lamp emits radiation in a wavelength range which passes through a glass plate in the chamber wall but is absorbed by the heating disk, which may consist of graphite. When the disk is heated to 1000.degree. K. it emits radiation in a wavelength range which can be absorbed by a transparent substrate in the holder.

REFERENCES:
patent: 4081313 (1978-03-01), McNeilly et al.
patent: 4581520 (1986-04-01), Vu et al.
patent: 4654509 (1987-03-01), Robinson et al.
patent: 5047611 (1991-09-01), Stultz
patent: 5245158 (1993-09-01), Hashizume et al.
Van Winkle, H.E., "One-Way Radiant Heat Transfer", IBM Tech. Disclosure Bulletin, vol. 18, No. 4, Sep. 1975.

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