Apparatus for heat treatment of a substrate

Details Apparatus for heat treatment of a substrate Apparatus for heat treatment of a substrate

1989-06-19

1990-04-24

Yuen, Henry C.

Heating

Accessory means for holding, shielding or supporting work...

Support structure for heat treating ceramics

432258, F27D 500

Patent

active

049196146

ABSTRACT:
An apparatus for the heat treatment of a substrate comprises a heat treating plate for heating or cooling a substrate, three holes for one substrate provided on the surface of the heat treating plate whose position is selected to suitably place the substrate, and three balls respectively in the three holes with the diameter of the balls being slightly larger than the depth of the holes. The substrate is retained on the three balls for heat treatment.

REFERENCES:
patent: 1941941 (1934-01-01), Irwin
patent: 2208734 (1940-07-01), Schreiber
patent: 2273475 (1942-02-01), Schreiber
patent: 3266116 (1966-08-01), Rush
patent: 3904352 (1975-09-01), Thurnauer et al.
patent: 3948594 (1976-04-01), Irwin, Jr.
patent: 4362507 (1982-12-01), Antonucci
patent: 4407654 (1983-10-01), Irwin
patent: 4715812 (1987-12-01), von Matuschka et al.

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