Apparatus for heat treating substrates capable of quick cooling

Details Apparatus for heat treating substrates capable of quick cooling Apparatus for heat treating substrates capable of quick cooling

1989-09-22

1990-05-15

Yuen, Henry C.

Heating

With work cooling structure

432205, 432253, 432258, F27D 1502

Patent

active

049253883

ABSTRACT:
An apparatus for heat treating and quickly cooling substrates. The apparatus includes a cylindrical furnace core tube for containing substrates, a heater enclosing the furnace core tube, and outer cylinder enclosing and containing the furnace core tube and the heater, a blower for drafting cooling air to the space between the furnace core tube and the outer cylinder along the longitudinal direction of the furnace core tube, and a switching valve connected between the blower and both ends of the outer cylinder for switching the direction in which the cooling air travels. Since the direction of the cooling air is changed, the entire furnace core tube is uniformly cooled.

REFERENCES:
patent: 2257229 (1941-09-01), Drake
patent: 2397810 (1946-04-01), Roff
patent: 3622135 (1971-11-01), Bauer
patent: 3918890 (1975-11-01), Blaine
patent: 4351805 (1982-09-01), Reisman et al.
patent: 4430055 (1984-02-01), Sugiyama
patent: 4560348 (1985-12-01), Moller et al.

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