Apparatus for heat treating substrates

Details Apparatus for heat treating substrates Apparatus for heat treating substrates

1988-08-17

1989-11-28

Yuen, Henry C.

Heating

With work cooling structure

432121, F27D 1502

Patent

active

048834246

ABSTRACT:
An apparatus for heat treating substrates. The apparatus comprises a furnace core tube for containing the substrates, a heater provided for enclosing the furnace core tube, an inner cylinder provided for enclosing the heater, and an outer cylinder with a path for cooling water provided therein. The apparatus further comprises a heat reflecting mirror formed on an inner surface of the outer cylinder and a blower for ventilating the space between the furnace core tube and the inner cylinder. After heat treatment of the substrates is carried out, the blower is activated and the cooling water is circulated in the outer cylinder. Therefore, an undesirable rise in the temperature of the mirror can be prevented.

REFERENCES:
patent: 4050881 (1977-09-01), Watson, Jr.
patent: 4560348 (1985-12-01), Moller et al.
patent: 4584180 (1986-04-01), Ostrov
"Semiconductor World 1985 12", pp. 64-71.

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