Apparatus for handling semiconductor wafers during fabrication o

Details Apparatus for handling semiconductor wafers during fabrication o Apparatus for handling semiconductor wafers during fabrication o

1985-05-17

1987-08-18

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

6537413, B25B 1100, B25J 1506

Patent

active

046872426

ABSTRACT:
A semi-conductor wafer handling apparatus for use during fabrication of semi-conductor wafers, made of alumina and having a relieved flat face connected to a source of air pressure differential.

REFERENCES:
patent: 3272350 (1966-09-01), Pflaumer et al.
patent: 3404973 (1968-10-01), Nedelec
patent: 3533771 (1970-10-01), Stehl et al.
patent: 3655233 (1972-04-01), Twist
patent: 3694179 (1972-09-01), Deeg et al.
patent: 3728098 (1973-04-01), Giffen
patent: 4496180 (1985-01-01), Hillman et al.
IBM Technical Disclosure Bulletin, vol. 24, No. 6, Nov. 1981, "Vacuum Wafer Pick-Up Tip" by Ferrentino et al.

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