Apparatus for handling of a disklike member, especially for...

Details Apparatus for handling of a disklike member, especially for... Apparatus for handling of a disklike member, especially for...

2008-07-15

2008-07-15

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

11093472

ABSTRACT:
There is provided an apparatus for handling a disklike member having a surface, especially for handling of a wafer, including a robot for carrying out at least an angular motion in a defined moving plane, an end-effector for holding the disklike member, and a wrist member operatively interconnecting said robot with said end-effector. The wrist member provides at least a motion of the end-effector about an axis in a plane of the surface of the disklike member. An inclining motion of said disklike member is achieved by combining the angular motion of the robot and the motion about the axis in the plane of the surface.

REFERENCES:
patent: 4783107 (1988-11-01), Parker et al.
patent: 5105147 (1992-04-01), Karasikov et al.
patent: 6242879 (2001-06-01), Sagues et al.
patent: 6678581 (2004-01-01), Hung et al.
patent: 2004/0012363 (2004-01-01), Simondet
patent: 2000-162133 (2000-06-01), None
patent: WO 02/02282 (2002-01-01), None
patent: WO 03/027652 (2003-04-01), None

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