Apparatus for handling delicate articles such as silicon wafers

Handling: hand and hoist-line implements – Utilizing fluid pressure – Venturi effect

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B66C 102

Patent

active

040507297

ABSTRACT:
A tapered, generally triangular, rigid housing in which one angle forms a leading edge and the opposite side of the triangle forms a trailing edge. A vacuum attachment nozzle extends into the housing from the trailing edge toward the leading edge. A pliable suction cup is mounted and fixed in said housing by the vacuum nozzle which extends therethrough and is in fluid communication with the interior of a chamber in the suction cup. The exposed portion of the cup comprises a tapered, pliable, generally circular lip which extends slightly beyond one face of the housing. A plurality of wafer-contacting surfaces are located loosely adjacent the periphery of the lip, each spaced 120.degree. from the adjacent suface. A lifting finger may be attached to the leading edge of the housing in order to pick up wafers which are stored on a horizontal surface and move the wafers onto the lip for grasping thereby.

REFERENCES:
patent: 1757529 (1930-05-01), Jones
patent: 2310995 (1943-02-01), Robinson
patent: 3272549 (1966-09-01), Nisula
patent: 3361469 (1968-01-01), Yeager
patent: 3517958 (1970-06-01), Boucher et al.
patent: 3843183 (1974-10-01), Hutson
IBM Technical Disclosure Bulletin, vol. 9, No. 7, Dec. 1966, p. 950, "Vacuum Pick-up Device," Delgado and Sheiner.
Western Electric Technical Digest, No. 27, July 1972, p. 3, "Improved Vacuum Pick-up Tool for Semiconductor Wafers".

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