Apparatus for handling and treating wafers

Details Apparatus for handling and treating wafers Apparatus for handling and treating wafers

1977-03-18

1982-02-16

Mackey, Robert

Conveyors: fluid current

With diverse power-driven conveyor

Reciprocating or oscillating

406 72, 406 88, 118 50, 118 52, 118 54, 198339, 198344, B65G 5102

Patent

active

043157050

ABSTRACT:
A wafer processing system for spin processing photoresist liquid on a silicon wafer and automatically sequencing them through the processor includes a shuttle having upper and lower air bearing slides. The upper slide receives the wafer from a supply magazine and centers it on a rotating chuck and the lower slide of the shuttle receives the wafer from the chuck and allows it to be transferred to a receive track.

REFERENCES:
patent: 3645581 (1972-02-01), Lasch, Jr. et al.
patent: 3947236 (1976-03-01), Lasch, Jr.
patent: 4030622 (1977-06-01), Brooks et al.

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