Apparatus for growing single crystals of III-V compound semicond

Details Apparatus for growing single crystals of III-V compound semicond Apparatus for growing single crystals of III-V compound semicond

1992-02-28

1993-10-26

Breneman, R. Bruce

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

C30B 3500

Patent

active

052563812

ABSTRACT:
An apparatus for growing single crystals of III-V compound semiconductors of the vapor pressure control type using a vertical puller characterized by dividing the surface area of a melt into two sections, covering one section with a liquid encapsulant while maintaining the other section in contact with the atmosphere of the vessel (furnace). The apparatus comprises a sealable vessel, an upper shaft, a lower shaft, a plurality of heaters, a crucible and a means for dividing the surface of the melt contained in the crucible. As a result, single crystals of III-V compound semiconductors having various excellent properties such as low impurity content (high purity), low dislocation density and the like maybe obtained.

REFERENCES:
patent: 3741817 (1973-06-01), Bienert et al.
patent: 4167554 (1979-09-01), Fisher
patent: 4352784 (1982-10-01), Lin
patent: 4556784 (1985-12-01), Nakai
patent: 4664742 (1987-05-01), Tomizawa et al.
patent: 4750969 (1988-06-01), Sassa et al.

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