Apparatus for growing metal oxides using organometallic vapor ph

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

117 84, 118715, C30B 3500

Patent

active

054580862

ABSTRACT:
The methods and apparatus disclosed enable controlled growth of multicomponent metal oxide thin films, including high temperature superconducting (HTS) thin films, which are uniform and reproducible. The method and apparatus enable a controlled flow and pressure of a gaseous phase of metal containing molecules to be introduced into a reaction chamber, or into an analysis chamber, or into both. The flow into the reaction chamber enables deposition of metal oxides on a substrate and, therefore, growth of multicomponent metal oxide thin films, including HTS thin films, on the substrate. The flow into the analysis chamber enables compositional analysis of the gas. The apparatus also allows adjustment of the gaseous phase flow and pressure into the reaction chamber based upon the results of the compositional analysis. In one aspect of this invention, a heating mantle provides substantially uniform heating throughout the apparatus.

REFERENCES:
patent: 4855254 (1989-08-01), Eshita et al.
patent: 4985117 (1991-01-01), Kurosawa et al.
patent: 5047390 (1991-09-01), Higashino et al.
patent: 5061684 (1991-10-01), Freller et al.
patent: 5071830 (1991-12-01), Olson et al.
patent: 5096880 (1992-03-01), Rybka
patent: 5108983 (1992-04-01), Lackey, Jr. et al.
patent: 5138520 (1992-08-01), McMillan et al.
patent: 5141917 (1992-08-01), Tanaka et al.
patent: 5157015 (1992-10-01), Snyder et al.
patent: 5162296 (1992-11-01), Yamazaki
patent: 5164363 (1992-11-01), Eguchi et al.
patent: 5173474 (1992-12-01), Connell et al.
patent: 5185317 (1993-02-01), Wessels et al.
patent: 5198412 (1993-03-01), Nagesh et al.
patent: 5204314 (1993-04-01), Kirlin et al.
Bednorz and Muller, Possible High Tc Superconductivity in the Ba-La-Cu-O System 64 Z. Phys. B-Condensed Matter 189 (1986).
Wu, et al., Superconductivity at 93K in a New Mixed-Phase Y-Ba-Cu-O Compound System at Ambient Pressure 58 Phys. Rev. Lett. 908 (1987).
Maeda, A New High-Tc Oxide Superconductor Without a Rare Earth Element 37 J. App. Phys. L209 (1988).
Chu, et al., Superconductivity up to 114K in the Bi-Al-Ca-Br-Cu-O Compound System Without Rare Earth Elements 60 Phys. Rev. Lett. 941 (1988).
Dijkkamp, et al., Preparation of Y-Ba-Cu Oxide Superconductor Thin Films Using Pulsed Laser Evaporation Form High T.sub.c Bulk Material 51 Appl. Phys. Lett. 619 (1987).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus for growing metal oxides using organometallic vapor ph does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for growing metal oxides using organometallic vapor ph, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for growing metal oxides using organometallic vapor ph will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-589830

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.