Apparatus for growing large silicon carbide single crystals

Details Apparatus for growing large silicon carbide single crystals Apparatus for growing large silicon carbide single crystals

1995-09-05

1997-11-04

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

117202, 117204, 117900, C30B 3500

Patent

active

056835078

ABSTRACT:
An apparatus for growing single-polytype, single crystals of silicon carbide utilizing physical vapor transport as the crystal growth technique. The apparatus has a furnace which has a carbon crucible with walls that border and define a crucible cavity. A silicon carbide source material provided at a first location of the crucible cavity, and a monocrystalline silicon carbide seed is provided at a second location of the crucible cavity. A heat path is also provided in the furnace above the crucible cavity. The crucible has a stepped surface that extends into the crucible cavity. The stepped surface has a mounting portion upon which the seed crystal is mounted. The mounting portion of the stepped surface is bordered at one side by the crucible cavity and is bordered at an opposite side by the furnace heat path. The stepped surface also has a sidewall that is bordered at one side by and surrounds the furnace heat path. The apparatus may also have a thermal insulating member, in which a side of the stepped surface sidewall opposite to the furnace heat path is bordered by the thermal insulating member.

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"Bulk and Perimeter Generation in 6H-SiC Diodes", J.A. Cooper, Jr. J.W. Palmout, C.T. Gardner, M.R. Melloch, C.H. Carter, Jr. International Semiconductor Device Research Symposium, Charlottesville, VA, Dec. 1991.
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