Apparatus for growing films by flash vaporization

Details Apparatus for growing films by flash vaporization Apparatus for growing films by flash vaporization

1976-11-22

1978-03-28

Kaplan, Morris

Coating apparatus

With vacuum or fluid pressure chamber

118 7, 118 491, 219 1041, C23C 1312

Patent

active

040809269

ABSTRACT:
A method of and apparatus for growing films composed of low-melting-point materials from a feed material whose constituents have large differences in vapor pressure. In the system disclosed, the feed material is contained within an ampoule whose only outlet is a downwardly directed capillary tube and delivered in the form of a melt to a heated environment whose temperature is higher than the temperature of vaporization of the constituent of the feed material having the highest vaporization temperature, thereby to effect flash vaporization of the liquid and thus avoid changes in composition or phase separation.

REFERENCES:
patent: 3183563 (1965-05-01), Smith, Jr.
patent: 3400241 (1968-09-01), Gloersen et al.
patent: 3494853 (1970-02-01), Anderson et al.
patent: 3506803 (1970-04-01), Hart
patent: 3607135 (1971-09-01), Gereth et al.
patent: 3704216 (1972-11-01), Kinstley et al.
patent: 3930463 (1976-01-01), Bickerdike et al.
IBM Technical Disclosure Bulletin, "Manufacturing Reproducible Uniform Composition Alloy Layers Containing at Least Two Components", Ruh et al., vol. 12, No. 11, [April 1970], pp. 2016, 2017.

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