Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Patent
1993-12-23
1994-11-08
Breneman, R. Bruce
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
With means for measuring, testing, or sensing
117203, 117901, B01D 900
Patent
active
053623258
ABSTRACT:
A material processing apparatus includes a plurality of syringes provided detachable on a base member and containing fluids that are used for processing a material; A processing chamber is provided detachable on the base member for causing the material processing: An actuation mechanism actuates the plurality of syringes to supply the fluids in the syringes to the processing chamber; An interconnection fixture connects the plurality of syringes to the processing chamber for transporting the fluids in the plurality of syringes to the processing chamber. The plurality of syringes are provided detachable with respect to the interconnection fixture, and the processing chamber is provided detachable with respect to the interconnection fixture.
REFERENCES:
patent: 4917707 (1990-04-01), Claramonte et al.
patent: 4919900 (1990-04-01), Martin et al.
patent: 5013531 (1991-05-01), Snyder et al.
patent: 5078975 (1992-01-01), Rhodes et al.
"Preliminary Investigations of Protein Crystal Growth Using The Space Shuttle"; DeLucas et al.; Journal of Crystal Growth, 76 (1986), pp. 683-693.
Asano Koji
Gotoh Makoto
Oka Kotaro
Shiraishi Atsushi
Breneman R. Bruce
Fujitsu Limited
Garrett Felisa
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