Coating apparatus – Program – cyclic – or time control – Having timer
Patent
1984-03-05
1985-06-18
Smith, John D.
Coating apparatus
Program, cyclic, or time control
Having timer
118719, 118723, 118 501, 118704, 118697, 427 39, C23C 1308
Patent
active
045235449
ABSTRACT:
A thin amorphous film-forming apparatus comprising a plurality of discharge unit chambers connected in a loop, each provided with a glow discharge generating means and a space for storing a substrate, gas supply and discharge valves are provided between the unit chambers, and means for periodically changing the opening and closing of the valves.
REFERENCES:
patent: 3108900 (1963-10-01), Papp
patent: 4389970 (1983-06-01), Edgerton
patent: 4404076 (1983-09-01), Nakagawa et al.
patent: 4430959 (1984-02-01), Ebata et al.
patent: 4438188 (1984-03-01), Shimatani et al.
patent: 4452828 (1984-06-01), Namba
Adachi Toshikazu
Harada Nozomu
Ito Hiroshi
Plantz Bernard F.
Smith John D.
Tokyo Shibaura Denki Kabushiki Kaisha
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