Apparatus for glow discharge deposition of a thin film

Details Apparatus for glow discharge deposition of a thin film Apparatus for glow discharge deposition of a thin film

1984-03-05

1985-06-18

Smith, John D.

Coating apparatus

Program, cyclic, or time control

Having timer

118719, 118723, 118 501, 118704, 118697, 427 39, C23C 1308

Patent

active

045235449

ABSTRACT:
A thin amorphous film-forming apparatus comprising a plurality of discharge unit chambers connected in a loop, each provided with a glow discharge generating means and a space for storing a substrate, gas supply and discharge valves are provided between the unit chambers, and means for periodically changing the opening and closing of the valves.

REFERENCES:
patent: 3108900 (1963-10-01), Papp
patent: 4389970 (1983-06-01), Edgerton
patent: 4404076 (1983-09-01), Nakagawa et al.
patent: 4430959 (1984-02-01), Ebata et al.
patent: 4438188 (1984-03-01), Shimatani et al.
patent: 4452828 (1984-06-01), Namba

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