Apparatus for generation and control of dopant and reactive gase

Details Apparatus for generation and control of dopant and reactive gase Apparatus for generation and control of dopant and reactive gase

1978-01-19

1979-12-11

Mack, John H.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204260, 204266, C25B 900, C25B 1508

Patent

active

041782240

ABSTRACT:
A system for supplying arsine having automatic arsine monitoring and controls to a semiconductor reactor is described wherein arsine is electrochemically generated from an electrolyte solution such as an inorganic acid and an arsenite salt. The electrolytic cell vessel also comprises the cathode structure. A circular concentric barrier is provided to isolate the oxygen produced at the cathode in an annular region from the arsine generated at the anode located centrally within the cell.

REFERENCES:
patent: 1375819 (1921-04-01), Blumenberg, Jr.
patent: 1485706 (1924-03-01), Plauson
patent: 2193323 (1940-03-01), Nitzschke et al.
patent: 2228264 (1921-01-01), Freedley
patent: 3330755 (1967-07-01), Mahany

Affiliated with

Also associated with

Rating

Apparatus for generation and control of dopant and reactive gase does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for generation and control of dopant and reactive gase, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for generation and control of dopant and reactive gase will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-309664