Apparatus for generating ultraviolet laser radiation

Coherent light generators – Particular beam control device – Nonlinear device

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372 22, 372 23, 372 39, 372 69, 372 70, 359326, H01S 310, G02F 135

Patent

active

058621636

ABSTRACT:
An apparatus for generating ultraviolet laser radiation according to the present invention includes a laser light source and a frequency conversion device made of a nonlinear optical crystal on which laser light irradiated from the laser light source is made incident and which converts a frequency of the incident laser light to thereby irradiate the ultraviolet radiation. A protective film which prevents oxygen and water content from permeating thereinto is deposited on at least an output end surface, from which ultraviolet radiation is irradiated, of the nonlinear optical crystal. Therefore, it is possible to prevent characteristics of the frequency conversion device from being lowered due to change of a property thereof resulting from increased output power of laser light and to increase a lifetime thereof.

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patent: 5264959 (1993-11-01), Barker et al.
patent: 5520679 (1996-05-01), Lin
patent: 5552926 (1996-09-01), Owa et al.
patent: 5592326 (1997-01-01), Taira
patent: 5745284 (1998-04-01), Goldberg et al.

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