Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2005-06-13
2008-07-15
Berman, Jack I. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S503100, C378S119000
Reexamination Certificate
active
07399981
ABSTRACT:
The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device (3) receives the target (4) after it has interacted with the focused laser beams (1), and a collector device (110) collects the EUV radiation emitted by the target (4). The focusing elements (11) for focusing the laser beams on the target (4) are arranged in such a manner that the laser beams (1) are focused on the target (4) laterally, being situated in a common half-space relative to the target (4) and being inclined at a determined angle lying in the range about 60° to about 90° relative to a mean collection axis (6) perpendicular to the target (4). The collector device (110) is disposed symmetrically about the mean collection axis (6) in the half-space containing the laser beams (1) focused on the target (4) and inside a conical space (8) centered on the mean collection axis (6) with a vertex situated at the target (4) and a half-angle at the vertex that is less than the angle of inclination of the focused laser beams (1) relative to the mean collection axis (6). The device is suitable for use as a source for EUV radiation in lithography for fabricating integrated circuits.
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Abe, et al (“Development of a liquid-jet laser-produced-plasma light source for EUV lithography”, Proceedings of SPIE vol. 5037 (2003)).
Barthod Benoit
Cheymol Guy
Cormont Philippe
Schmidt Martin
Sublemontier Olivier
Alcatel Vacuum Technology France
Berman Jack I.
Commissariat Energie Atomique
Maskell Michael
Weingarten Schurgin, Gagnebin & Lebovici LLP
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