Apparatus for generating high currents of negative ions

Details Apparatus for generating high currents of negative ions Apparatus for generating high currents of negative ions

1990-03-06

1990-12-25

Anderson, Bruce C.

Radiant energy

Ion generation

Field ionization type

250425, H01J 2702

Patent

active

049805568

ABSTRACT:
Disclosed is an apparatus for the generation of large currents of negative ions for use in tandem accelerators, suitable for employment in ion implantation on an industrial production scale. The apparatus includes a high current positive ion source which is coupled to a charge exchange canal where a fraction of the positive ions are transformed into negative ions.

REFERENCES:
patent: 3374384 (1968-03-01), Donnelly
patent: 3395302 (1968-07-01), Brown et al.
patent: 3617789 (1971-11-01), Middleton et al.
patent: 4616157 (1986-10-01), Naylor et al.
patent: 4712012 (1987-12-01), Naylor

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