Radiant energy – Radiant energy generation and sources – With radiation modifying member
Patent
1997-05-19
1999-10-05
Nguyen, Kiet T.
Radiant energy
Radiant energy generation and sources
With radiation modifying member
G02B 1700
Patent
active
059628600
ABSTRACT:
An apparatus for generating controlled radiation for curing a photosensitive resin is disclosed. The apparatus comprises a source of radiation and an elongate reflector for directing said radiation in at least one radiating direction. The reflector has two ends spaced apart in a longitudinal direction, and a cross-section perpendicular to the longitudinal direction. The reflector further has an inner surface and an outer surface. The inner surface comprises a plurality of elongate reflective facets oriented parallel to the longitudinal direction. The reflective facets are adjustable in the cross-section for directing the curing radiation substantially parallel to at least one radiating direction. Optionally, a plurality of collimating elements disposed between the ends of the reflector may be utilized for controlling an angle of the curing radiation relative to the longitudinal direction. A radiation management device, preferably comprising a mini-reflector, juxtaposed with the source of radiation may also be utilized.
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Literature from Fusion UV Curing Systems: EPIQ 6000: The Next Dimesnion in UV Curing; Fusion Ultraviolet Curing Systems Industrial Power Supply; Fusion UV Curing Systems DRS 111 & DRS 120 Conveyors; Fusion Systems Benchtop Conveyor Model MC-6; Fusion Ultraviolet Curing Systems Model F450; Fusion Ultraviolet Curing Systems Model F300; Fusion Focus, vol. 5/No. 1/Sep., 1985; Fusion's Super Six (F200R) Ultraviolet Curing System; Fusion's Conveyorized Ultraviolet Curing Systems; Fusion's Conveyorized Ultraviolet Curing Systems for Flat Glass Production Lines; and The F450 Lamp System: Graphic Results Literature from Fusion Semiconductor Systems: For a Look at the Future of Multilayer Processing and Photoresist Stabilization . . . Turn on the Microlite.TM.; Introducing the MICROLITE.TM. 150 PC Photostabilizer for 6-inch Wafers; and MICROLITE.TM.: Now You Can Be More Critical.
Trokhan Paul Dennis
Vitenberg Vladimir
Huston Larry L.
Linman E. Kelly
Nguyen Kiet T.
The Procter & Gamble & Company
Vitenberg Vladimir
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