Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1997-02-06
1998-09-08
Dang, Thi
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
20429816, 20429837, 118723I, H05H 100
Patent
active
058040277
ABSTRACT:
An apparatus for generating magnetically neutral line discharge type plasma comprises a magnetic field generating coil for forming magnetically neutral lines defined by continuously connecting points of zero-intensity magnetic field that is arranged within the vacuum chamber so that a couple of lines of magnetic force crossing vertically at the magnetically neutral lines in the perpendicular plane where the center axis is located can be connected by surrounding the magnetic field generating coil without intersecting or touching the lateral wall of the vacuum chamber to reduce any possible loss of plasma and any possible damage to the lateral wall.
As the neutral line discharge type plasma has a capability to generate a well thermalized Maxwellian distribution plasma, an apparatus for generating the magnetically neutral line discharge type plasma is arranged to be utilized to diminish damage of of the lateral wall of the vacuum vessel and to control the electric potential of the plasma to be generated for ion extraction use.
REFERENCES:
patent: 5344536 (1994-09-01), Obuchi et al.
Dang Thi
Nihon Shinku Gijutsu Kabushiki Kaisha
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