Apparatus for generating and transporting a charged particle bea

Details Apparatus for generating and transporting a charged particle bea Apparatus for generating and transporting a charged particle bea

1988-03-29

1989-07-04

Anderson, Bruce C.

Radiant energy

Radiation controlling means

250396R, 2504923, 378137, H01J 314

Patent

active

048453714

ABSTRACT:
An apparatus for generating and transporting a charged particle beam. The apparatus has a source which generates the charged particle beam at two current levels, and a magnet system for bending the beam. Particles of different energies are bent along different paths, whereby at a specific height within the magnet system the radial displacement from the beam axis is a monotone function of the difference between the energy and the nominal energy. At this height there is provided an energy selection filter having at least one bimetallic element. This element projects into the beam and, thus, intercepts beam particles; it is designed such that its interception distance decreases with increasing beam current. As a result, the energy range of particles passing the filter is broader at the higher current level broader than at the lower current level.

REFERENCES:
patent: 3227880 (1966-01-01), Wideroe
patent: 4270053 (1981-05-01), Froitzheim
patent: 4715056 (1987-12-01), Vlasbloem et al.

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