Apparatus for forming nano-grating device

Details Apparatus for forming nano-grating device Apparatus for forming nano-grating device

2006-04-04

2006-04-04

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Holographic system or element

Hardware for producing a hologram

C359S030000, C359S566000

Reexamination Certificate

active

07023593

ABSTRACT:
An apparatus for forming a nano grating device to film nano-scale interference fringes by holography in order to makes a nano-scale meshed structure is disclosed. A beam emitted form a light source passes subsequently through a beam splitter and two reflectors to reach at symmetrically mounted light emitting modules. The light emitting modules generate two beams passing along the same optical paths and then projecting on a photosensitive substrate that is attached on a hemi-sphere lens. Thus, a first set of interference fringes are formed. Then, the substrate rotates with an angle and then is subjected to exposure to form a second set of interference fringes crossing the first set of interference fringes. Thereby, a nano-scale meshed structure is obtained.

REFERENCES:
patent: 6185019 (2001-02-01), Hobbs et al.
patent: 6687196 (2004-02-01), Ueyanagi
patent: 2003/0169671 (2003-09-01), Saimi et al.
patent: 2004/0032667 (2004-02-01), Gale et al.
patent: 2004/0239954 (2004-12-01), Bischoff

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