Apparatus for forming deposited film

Details Apparatus for forming deposited film Apparatus for forming deposited film

1986-12-19

1989-05-30

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

118715, C23C 1600

Patent

active

048340235

ABSTRACT:
An apparatus for forming a deposited film by bringing gaseous starting materials for forming deposited film contact with a gaseous halogenic oxidizing agent which exerts oxidative effect on the starting materials, comprises, in a chamber for forming the deposited film, gas discharge means comprised of a gas discharge pipe for discharging the gaseous starting materials and a gas discharge pipe for discharging the halogenic oxidizing agent and means for disposing supports on which a plurality of cylindrical supports for depositing the film thereon are arranged around the gas discharge means.

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