Apparatus for forming deposited film

Details Apparatus for forming deposited film Apparatus for forming deposited film

1987-01-13

1989-02-14

Pianalto, Bernard

Rotary expansible chamber devices

Heat exchange or non-working fluid lubricating or sealing

Valve regulated non-working fluid

118118, 156345, C23C 1600

Patent

active

048039470

ABSTRACT:
There is disclosed an apparatus for forming deposited film which forms deposited film on a substrate by introducing a gaseous starting material for formation of deposited film and a gaseous oxidizing agent having the property of oxidation action for said gaseous starting material through separate routes respectively into a film forming space to thereby effect chemical contact therebetween, comprising one or two or more chambers for formation of deposited film and one or two or more etching chambers for etching at least one of said substrate and the deposited film formed on the substrate connected to one another.

REFERENCES:
patent: 3598082 (1971-08-01), Rice
patent: 4436770 (1984-03-01), Nishizawa et al.
patent: 4438723 (1984-03-01), Cannella et al.
patent: 4622918 (1986-11-01), Bok

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