Apparatus for forming a thin film

Details Apparatus for forming a thin film Apparatus for forming a thin film

1991-04-11

1994-09-13

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118726, 21912115, 21912127, 21912129, C23C 1430

Patent

active

053465547

ABSTRACT:
An apparatus for forming a thin film irradiates an electron beam on a vaporizable substance held in a crucible. A pair of electromagnets are disposed in coplanar relation and at right angles to each other to generate a magnetic field which deflects the electron beam. An alternating current is applied to the electromagnets to generate the magnetic field, and the magnitude and frequency of the current are controlled so as to scan the electron beam in a circular pattern on the vaporizable substance.

REFERENCES:
patent: 3622679 (1971-11-01), Kennedy
patent: 3814829 (1974-06-01), Movchan
patent: 4620081 (1986-10-01), Zeren
patent: 4863581 (1989-09-01), Inokuti

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