Plastic article or earthenware shaping or treating: apparatus – Forming surface and means feeding fluent stock thereto
Reexamination Certificate
2007-10-02
2007-10-02
Davis, Robert (Department: 1722)
Plastic article or earthenware shaping or treating: apparatus
Forming surface and means feeding fluent stock thereto
C366S137000, C366S139000
Reexamination Certificate
active
10996199
ABSTRACT:
The present invention provides an apparatus for forming a chemical mechanical polishing pad, comprising a tank with polymeric materials, a storage silo with microspheres and a curative storage tank with curing agents. The apparatus further provides a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres and a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached. The apparatus further provides a premix run tank for storing the pre-mixture, a mixer for forming a mixture of the pre-mixture and the curing agents and a mold for molding the mixture.
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Kolesar David M.
Post Robert L.
Saikin Alan H.
Sarafinas Aaron
Chaet Marissa W.
Davis Robert
Deibert Thomas S.
Oh Edwin
Rohm and Haas Electronic Materials CMP Holdings Inc.
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