Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – By fluid pressure actuated flexible diaphragm
Reexamination Certificate
2011-04-19
2011-04-19
Eley, Timothy V (Department: 3723)
Plastic article or earthenware shaping or treating: apparatus
Preform reshaping or resizing means: or vulcanizing means...
By fluid pressure actuated flexible diaphragm
C100S211000, C425S398000, C425S405200, C425S423000, C451S548000
Reexamination Certificate
active
07927092
ABSTRACT:
Methods and apparatus for forming a semi-spherical polishing pad for polishing semiconductor surfaces, provide for: placing a polishing pad pre-form on a dome-shaped forming surface, the polishing pad pre-form including a circular body having a center and an outer peripheral edge, and a plurality of slots extending from the outer peripheral edge towards the center; disposing a bladder opposite to the dome-shaped forming surface and the polishing pad pre-form; inflating the bladder with a fluid such that the dome-shaped forming surface of the bonnet form presses against the polishing pad pre-form from one side and the bladder presses against the polishing pad pre-form from an opposite side; and maintaining the pressing step for a predetermined period of time to achieve the semi-spherical polishing pad.
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Cady Raymond Charles
Moore Michael John
Shalkey Mark Alex
Stocker Mark Andrew
Corning Incorporated
Eley Timothy V
Watson Bruce P.
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