Agitating – By injecting gas into mixing chamber – With stirrer
Reexamination Certificate
2007-10-02
2007-10-02
Soohoo, Tony G. (Department: 1723)
Agitating
By injecting gas into mixing chamber
With stirrer
C366S137000
Reexamination Certificate
active
10956844
ABSTRACT:
The present invention provides an apparatus20for forming a striation-reduced chemical mechanical polishing pad4. The polishing pad4comprises a first delivery line66for delivering a polymeric material52into a mixer68and a second delivery line44for delivering microspheres48into the mixer68with the polymeric material52. The second delivery line44is connected to a bulk density control unit21. The bulk density control unit21comprises a storage hopper22for storing the microspheres48. The storage hopper22further comprises a porous membrane24provided over a plenum26. A fluidizing gas source23is connected to the plenum26through a gas inlet line27. Gas28fed into the plenum26from the fluidizing gas source23permeates through the porous membrane24and reduces the initial bulk density of the microspheres48in the storage hopper22.
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Koetas Joseph P.
Leviton Alan E.
Norton Kari-Ell
November Samuel J.
Robertson Malcolm W.
Deibert Thomas S.
Oh Edwin
Rohm and Haas Electronic Materials CMP Holdings Inc.
Soohoo Tony G.
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